Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani
A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.
A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.
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